Abstract: This paper reports an $8 \times 8$ micromirror array with quasi-static 3-DOF continuous actuation, high fill factor, and large effective optical aperture. Composed of a doublelayer structure ...
Abstract: A PZT-based high fill-factor high density large PMUT array is designed and fabricated with 64 array elements and integrating a total of 15360 PMUT cells (cavity size 85μm). The impedance ...
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