Abstract: The Sum of Coherence System (SOCS) algorithm is commonly used to calculate the aerial images of partially coherent systems in the lithography simulation. However, computing the kernels of ...
Abstract: To explore the anisotropic nature and improve computational efficiency, eigenvalue (EV-) analysis is adopted to implement the transfer matrix method (TMM), abbreviated as EV-TMM, enabling ...
To enable more accurate estimation of connectivity, we propose a data-driven and theoretically grounded framework for optimally designing perturbation inputs, based on formulating the neural model as ...
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