Capacitive displacement sensor’s touch-free nature makes it ideal for fragile surfaces and high-speed machinery.
Abstract: This letter presents the design methodology and heterogeneous fabrication process of a novel dual-mode microelectromechanical systems gas pressure sensor that vertically integrates ...
Abstract: A new type of coplanar capacitance sensor was designed to address the problem that coplanar capacitance sensors are difficult to use for measuring and characterizing defects at different ...
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