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Abstract: The authors offer a discussion on two alternative approaches to build the high-power radio frequency (RF) plasma systems with apparent power consumption of 400–600 kVA. The first so named ...
Abstract: This letter proposes a wafer-level packaged (WLP) single-chip sequential rotation Crossbar (SR-Crossbar) RF MEMS switch matrix, which has been fabricated and measured. Optimizations are ...
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